Category :Abatement systems,
Abatement of VOC contaminants in clean room air stream by using adsorbent media in regenerative cycle. | VOCs are typically carcinogenic and may cause nervous system disorders. | Photoresist and other materials outgas and contaminate clean room air with VOCs in low concentrations.
Abatement of VOC contaminants in clean room air stream by using adsorbent media in regenerative cycle. | VOCs are typically carcinogenic and may cause nervous system disorders. | Photoresist and other materials outgas and contaminate clean room air with VOCs in low concentrations.
