Category :Abatement systems,
Abatement of semiconductor and display process exhaust stream using water. | Water soluble gas (HCl, HF, NH3, etc.) | Versatile due to its large flow capacity and multiple inlet ports - wet bench exhaust treatment to small lab house scrubber. | Multi-stage water scrubber provides high solids and abatement efficiency | Solids handling features extend PM interval.
Abatement of semiconductor and display process exhaust stream using water. | Water soluble gas (HCl, HF, NH3, etc.) | Versatile due to its large flow capacity and multiple inlet ports - wet bench exhaust treatment to small lab house scrubber. | Multi-stage water scrubber provides high solids and abatement efficiency | Solids handling features extend PM interval.
