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  3. Gas Abatement System - Burn Type
Gas Abatement System - Burn Type
Gas Abatement System - Burn Type
Gas Abatement System - Burn Type
Gas Abatement System - Burn Type
Gas Abatement System - Burn Type
Gas Abatement System - Burn Type

Gas Abatement System - Burn Type

Category :Abatement systems,

Abatement of semiconductor process exhaust stream using a high-temperature burner. - Choice of high energy and medium energy burners allows for efficient abatement of the wide range of processes. - Energy Saving Mode feature conserves utility - Self-cleaning reactor design extends PM interval - System core & module swap maintenance capability reduces PM duration - GWG (CF4, SF6, NF3, etc.) - Corrosive gas (Cl2, F2, BCl3, HBr, etc.) - Flammable gas (SiH4, TEOS, DCS, H2, etc.)

- Choice of high energy and medium energy burners allows for efficient abatement of the wide range of processes. - Energy Saving Mode feature conserves utility - Self-cleaning reactor design extends PM interval - System core & module swap maintenance capability reduces PM duration - GWG (CF4, SF6, NF3, etc.) - Corrosive gas (Cl2, F2, BCl3, HBr, etc.) - Flammable gas (SiH4, TEOS, DCS, H2, etc.)

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